DocumentCode :
2920292
Title :
High Power and High Repetition Nd: YAG Laser Pumped by cw Laser Diodes
Author :
Fujita, Hisanori ; Nakatsuka, Masahiro ; Wang, Tao ; Tsubakimoto, Kouji ; Fujimoto, Yasushi ; Yoshida, Hidetsugu ; Miyanaga, Noriaki ; Izawa, Yasukazu ; Matsuoka, Sinichi ; Kubomura, Hiroyuki ; Kasamatsu, Tadashi ; Uchiyama, Takayuki ; Miyajima, Hirofumi
Author_Institution :
Institute of Laser Engineering, Osaka University, Japan, fuiitah@lie.osaka-u.ac.jp
fYear :
2005
fDate :
30-02 Aug. 2005
Firstpage :
146
Lastpage :
147
Abstract :
We have been developing a high repetition (5 kHz) and high power (5 kW) Nd: YAG laser system pumped by cw LDs for EUV lithography. Design concepts and experimental results will be reported.
Keywords :
Diode lasers; Fiber lasers; Laser excitation; Laser modes; Neodymium; Power lasers; Pulse amplifiers; Pulse modulation; Pump lasers; Semiconductor laser arrays;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
Type :
conf
DOI :
10.1109/CLEOPR.2005.1569375
Filename :
1569375
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2920292
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