Title :
Low-power hermetically sealed on-chip plasma light source micromachined in glass
Author :
Carazzetti, P. ; Renaud, Ph ; Shea, H.
Author_Institution :
Ecole Polytech. Fed. de Lausanne, Lausanne
Abstract :
We report on the fabrication and testing of a chip-scale plasma light source. The device consists of a stack of three anodically bonded Pyrex wafers, which hermetically enclose a gas-filled cavity in which electrodes are used to ignite a low power (<500 mW) RF plasma.
Keywords :
glass; light sources; micromechanical devices; plasma materials processing; Pyrex wafers; RF plasma; gas-filled cavity; glass; micromachines; on-chip plasma light source; Electrodes; Fabrication; Glass; Hermetic seals; Light sources; Plasma devices; Plasma sources; Radio frequency; Testing; Wafer bonding;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443782
