Title :
multi-axial super-stretchable interconnects with active electronics
Author :
Kim, Hyun-Joong ; Son, Chulwoo ; Ziaie, Babak
Author_Institution :
Purdue Univ., West Lafayette
Abstract :
We report on the fabrication and characterization of stretchable interconnects using room temperature liquid alloy filled PDMS microchannels. Several novel fabrication techniques are presented to increase the functionality and manufacturing yield. These include selective deposition of a gold wetting layer at the bottom of the channels, microfluidic injection of room temperature liquid alloy, and reservoirs for accommodation of surface mount components. Achieved maximum stretchability of a bi-axial diamond-shaped structure is 100% with a 0.24 Omega resistance variation. Active electronics is also integrated onto the PDMS substrate with stretchable interconnects and tested for functionality.
Keywords :
integrated circuit interconnections; integrated circuit layout; integrated circuit manufacture; liquid alloys; liquid phase deposition; surface mount technology; wetting; PDMS microchannels; active electronics; biaxial diamond-shaped structure; gold wetting layer; microfluidic injection; multiaxial super-stretchable interconnects; room temperature liquid alloy; selective deposition; surface mount components; Curing; Electronic equipment testing; Fabrication; Gold alloys; Microchannel; Microfluidics; Reservoirs; Substrates; Surface treatment; Temperature;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443784