DocumentCode :
2920597
Title :
Study on the lower resolution limit and the temperature-dependent performance of a surface micromachined gyroscope
Author :
Kulygin, A. ; Kirsch, C. ; Schwarz, P. ; Schmid, U. ; Seidel, H.
Author_Institution :
Saarland Univ., Saarbruecken
fYear :
2008
fDate :
13-17 Jan. 2008
Firstpage :
868
Lastpage :
871
Abstract :
This paper reports on the characterization of a novel micromachined angular rate sensor with a single point mechanical suspension targeted for automotive applications. In detail, the lower resolution limit of the sensor element was determined at application-relevant ambient pressure levels ranging from 1 to 10 mbar. Furthermore, the temperature-dependent performance of the gyroscope was measured at an ambient pressure of 3 mbar which was found to be an optimized value for achieving high performance at acceptable excitation voltage levels. The temperature coefficients of sensitivity (TCS) and frequency (TCF) were determined experimentally in a custom-built measurement set-up.
Keywords :
angular measurement; automotive engineering; gyroscopes; microsensors; suspensions (mechanical components); automotive applications; frequency temperature coefficient; lower resolution limit; mechanical suspension; micromachined angular rate sensor; sensitivity temperature coefficient; surface micromachined gyroscope; temperature-dependent performance; Automotive engineering; Frequency; Gyroscopes; Mechanical sensors; Microfluidics; Optical design; Optical sensors; Pressure measurement; Sensor phenomena and characterization; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
ISSN :
1084-6999
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2008.4443794
Filename :
4443794
Link To Document :
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