Title :
Study on the lower resolution limit and the temperature-dependent performance of a surface micromachined gyroscope
Author :
Kulygin, A. ; Kirsch, C. ; Schwarz, P. ; Schmid, U. ; Seidel, H.
Author_Institution :
Saarland Univ., Saarbruecken
Abstract :
This paper reports on the characterization of a novel micromachined angular rate sensor with a single point mechanical suspension targeted for automotive applications. In detail, the lower resolution limit of the sensor element was determined at application-relevant ambient pressure levels ranging from 1 to 10 mbar. Furthermore, the temperature-dependent performance of the gyroscope was measured at an ambient pressure of 3 mbar which was found to be an optimized value for achieving high performance at acceptable excitation voltage levels. The temperature coefficients of sensitivity (TCS) and frequency (TCF) were determined experimentally in a custom-built measurement set-up.
Keywords :
angular measurement; automotive engineering; gyroscopes; microsensors; suspensions (mechanical components); automotive applications; frequency temperature coefficient; lower resolution limit; mechanical suspension; micromachined angular rate sensor; sensitivity temperature coefficient; surface micromachined gyroscope; temperature-dependent performance; Automotive engineering; Frequency; Gyroscopes; Mechanical sensors; Microfluidics; Optical design; Optical sensors; Pressure measurement; Sensor phenomena and characterization; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2008.4443794