Inherently robust micro gyroscope actuated by parametric resonance

Author

Oropeza-Ramos, Laura A. ; Burgner, Christopher B. ; Turner, Kimberly L.

Author_Institution

Univ. of California, Santa Barbara

fYear

2008

fDate

13-17 Jan. 2008

Firstpage

872

Lastpage

875

Abstract

The sensitivity loss, commonly presented in micro gyroscopes based on harmonic oscillators [1], is overcome by using parametric resonance as an actuation mechanism. This operation has been analytically studied in IEEE- Sensors´05 [2] and preliminary dynamical characterization and experimental setup has been presented in IDETC/CIE- ASME´07 [3]. The device is fabricated using SOI process and in this paper we report complete rate table characterization including off-axis isolation, drift, hysteresis and noise of the micro gyroscope with an additional amplification stage.

Keywords

gyroscopes; microactuators; microsensors; silicon-on-insulator; SOI process; Si; actuation mechanism; amplification stage; dynamical characterization; harmonic oscillators; parametric resonance; rate table characterization; robust micro gyroscope; sensitivity loss; Differential equations; Electrostatics; Fabrication; Frequency; Gyroscopes; Hysteresis; Nonlinear equations; Oscillators; Resonance; Robustness;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Conference_Location

Tucson, AZ

ISSN

1084-6999

Print_ISBN

978-1-4244-1792-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2008.4443795

Filename

4443795