Title :
Direct Fabrication of 2D Glass Photonic Crystals by Nanoimprint Lithography
Author :
Ishihara, Kuniaki ; Fujita, Masayuki ; Matsubara, Ippei ; Asano, Takashi ; Noda, Susumu
Author_Institution :
Kyoto University, Japan; ishihara@qoe.kuee.kyoto-u.ac.jp
Abstract :
Nanoimprint lithography is attracting much attention for the development of large-scale photonic nanostructures. We demonstrate here a successful fabrication of two-dimensional photonic crystals with a period of 300 nm on a glass substrate at 360°C by using direct nanoimprint lithography.
Keywords :
Diffraction; Fabrication; Glass; Large-scale systems; Nanolithography; Nanostructures; Organic light emitting diodes; Personal communication networks; Photonic crystals; Plasma temperature;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569409
