Title :
Design for reliability of MEMS/MOEMS for lightwave telecommunications
Author :
Shea, Herbert R. ; Arney, Susanne ; Gasparyan, Arman ; Haueis, Martin ; Aksyuk, Vladimir A. ; Bolle, Cristian A. ; Frahm, Robert E. ; Goyal, Suresh ; Pardo, Flavio ; Simon, Maria Elina
Author_Institution :
Lucent Technol. Bell Labs., Murray Hill, NJ, USA
Abstract :
The influences of materials systems, processing subtleties, and reliability requirements on the design, flexibility, functionality and commercialization of MOEMS are complex. A tight interdependent feedback loop between component/subsystem/system design, fabrication, packaging, manufacturing and reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating commercialization.
Keywords :
failure analysis; micro-optics; micromechanical devices; optical communication equipment; semiconductor device reliability; MEMS/MOEMS; commercialization; component design; design for reliability; fabrication; failure modes; flexibility; functionality; interdependent feedback loop; lightwave telecommunications; manufacturing; materials systems; packaging; reliability requirements; subsystem design; system design; Failure analysis; Microelectromechanical devices; Micromechanical devices; Optical attenuators; Optical device fabrication; Optical devices; Optical feedback; Optical fiber networks; Optical modulation; Packaging;
Conference_Titel :
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7500-9
DOI :
10.1109/LEOS.2002.1159357
