Title :
Design of a high voltage fully differential driver for a double axis scanning micromirror
Author :
Volpi, Emilio ; Fanucci, Luca ; Ascoli, Francesco D.
Author_Institution :
Dept. of Inf. Eng., Univ. of Pisa, Pisa, Italy
Abstract :
The design of a high voltage fully differential driver in a 0.18 mum Bipolar-CMOS-DMOS (BCD) technology for the actuation of a double axis scanning micromirror is presented. The proposed circuit has a driving voltage capability up to 25 V and a low Total Harmonic Distortion in order to prevent the excitation of unwanted micromirror´s higher resonating modes. This design features a low voltage input stage and a programmable output common mode voltage. After a description of the circuit, results of simulations performed with an equivalent electrical model of the micromirror are presented.
Keywords :
CMOS integrated circuits; harmonic distortion; micromirrors; bipolar-CMOS-DMOS technology; double axis scanning micromirror; high voltage fully differential driver; size 0.18 mum; total harmonic distortion; voltage 25 V; Circuits; Displays; Electrodes; Electrostatics; Fingers; Frequency; Low voltage; Micromirrors; Springs; Torque;
Conference_Titel :
Research in Microelectronics and Electronics, 2009. PRIME 2009. Ph.D.
Conference_Location :
Cork
Print_ISBN :
978-1-4244-3733-7
Electronic_ISBN :
978-1-4244-3734-4
DOI :
10.1109/RME.2009.5201315
