• DocumentCode
    2920965
  • Title

    Design of a high voltage fully differential driver for a double axis scanning micromirror

  • Author

    Volpi, Emilio ; Fanucci, Luca ; Ascoli, Francesco D.

  • Author_Institution
    Dept. of Inf. Eng., Univ. of Pisa, Pisa, Italy
  • fYear
    2009
  • fDate
    12-17 July 2009
  • Firstpage
    112
  • Lastpage
    115
  • Abstract
    The design of a high voltage fully differential driver in a 0.18 mum Bipolar-CMOS-DMOS (BCD) technology for the actuation of a double axis scanning micromirror is presented. The proposed circuit has a driving voltage capability up to 25 V and a low Total Harmonic Distortion in order to prevent the excitation of unwanted micromirror´s higher resonating modes. This design features a low voltage input stage and a programmable output common mode voltage. After a description of the circuit, results of simulations performed with an equivalent electrical model of the micromirror are presented.
  • Keywords
    CMOS integrated circuits; harmonic distortion; micromirrors; bipolar-CMOS-DMOS technology; double axis scanning micromirror; high voltage fully differential driver; size 0.18 mum; total harmonic distortion; voltage 25 V; Circuits; Displays; Electrodes; Electrostatics; Fingers; Frequency; Low voltage; Micromirrors; Springs; Torque;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Research in Microelectronics and Electronics, 2009. PRIME 2009. Ph.D.
  • Conference_Location
    Cork
  • Print_ISBN
    978-1-4244-3733-7
  • Electronic_ISBN
    978-1-4244-3734-4
  • Type

    conf

  • DOI
    10.1109/RME.2009.5201315
  • Filename
    5201315