Title :
Solidly mounted resonators under high power study for reliability assessment
Author :
Ben Hassine, N. ; Mercier, Denis ; Renaux, Philippe
Author_Institution :
STMicroelectronics, Crolles, France
Abstract :
This work deals with BAW SMR reliability at high power levels. Experimental methods easy to set up in common RF laboratories are presented and validated. Experimental results concerning frequency shifts versus the dissipated power and the harmonics generation are reported. The main origins of these effects are discussed physically and conclusions in light of the obtained results about the characterization method and the device reliability are drawn.
Keywords :
bulk acoustic wave devices; resonators; semiconductor device reliability; BAW; high power resonator; reliability assessment; solidly mounted resonators; Acoustic waves; Electrodes; Film bulk acoustic resonators; Impedance; Microwave technology; Optical films; Radio frequency; Resonance; Substrates; Testing;
Conference_Titel :
Research in Microelectronics and Electronics, 2009. PRIME 2009. Ph.D.
Conference_Location :
Cork
Print_ISBN :
978-1-4244-3733-7
Electronic_ISBN :
978-1-4244-3734-4
DOI :
10.1109/RME.2009.5201318