DocumentCode :
2921060
Title :
Parylene-HT-based electret rotor generator
Author :
Lo, Hsi-wen ; Tai, Yu-Chong
Author_Institution :
California Inst. of Technol., Pasadena
fYear :
2008
fDate :
13-17 Jan. 2008
Firstpage :
984
Lastpage :
987
Abstract :
A new micro power generator with parylene HT electret rotor is made. This generator uses parylene HT as a new electret material with a much superior charge density compared to teflon and CYTOP. The highest surface potential observed is 204.58 V/mum, equivalent to a surface charge density of 3.69 mC/m2. The generator uses an electret rotor. The rotor is a piece of PEEK insulator block coated with a layer of corona-charged parylene HT. Both output electrodes are on the stator. The generator produces 17.98 muW with 80MOmega load at 50Hz and 7.77 muW with an 800MOmega load at 10Hz.
Keywords :
corona; electrets; rotors; small electric machines; surface potential; PEEK insulator; corona-charged parylene HT electret rotor; frequency 10 Hz; frequency 50 Hz; micro power generator; power 17.98 muW; power 7.77 muW; surface charge density; surface potential; Annealing; Corona; Current measurement; Density measurement; Electrets; Power generation; Rotors; Surface charging; Temperature; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
ISSN :
1084-6999
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2008.4443823
Filename :
4443823
Link To Document :
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