Suspended nanoscale solenoid metal inductor with tens-nH level inductance

This paper reports a novel suspended nanoscale solenoid metal inductor with inductance of several tens-nH for analog-circuit and radio-frequency application. The nanoscale inductors consist of three-dimensional aluminum or gold nanohelices, which are transformed from nanometer thick metal cantilevers by focused-ion-beam stress-introducing technology. For the inductor with a two-turn helix conductor, the inductance is measured to reach more than 20 nH while the structure size is less than 10 times 2 mum². The quality factor is 1.4 at 100 MHz, and might increase to about several tens at Gigahertz. The inherent series resistance of the two-turn inductor is 10.6 Ohm.