Title :
Atomic force microscopy at ultrasonic frequencies
Author :
Rabe, U. ; Arnold, W.
fDate :
Oct. 31 1994-Nov. 3 1994
Abstract :
We present a new type of near-field Acoustic Microscopy combining Atomic Force Microscopy (AFM) and Acoustic Microscopy. The lateral resolution is given by the probe diameter instead of the acoustic wavelength and can reach atomic scale on flat samples. The ultrasonic vibrations of the AFM cantilever are examined as well as the nonlinear interaction between the AFM tip and the sample surface. An ultrasonic image taken with the new technique is shown
Keywords :
acoustic microscopy; atomic force microscopy; ultrasonic imaging; AFM cantilever; atomic force microscopy; atomic scale resolution; near-field acoustic microscopy; nonlinear interaction; sample surface; ultrasonic image; ultrasonic vibrations; Acoustic imaging/mapping; Acoustic microscopy;
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1994.401611
