• DocumentCode
    292141
  • Title

    Atomic force microscopy at ultrasonic frequencies

  • Author

    Rabe, U. ; Arnold, W.

  • Volume
    1
  • fYear
    1994
  • fDate
    Oct. 31 1994-Nov. 3 1994
  • Firstpage
    367
  • Abstract
    We present a new type of near-field Acoustic Microscopy combining Atomic Force Microscopy (AFM) and Acoustic Microscopy. The lateral resolution is given by the probe diameter instead of the acoustic wavelength and can reach atomic scale on flat samples. The ultrasonic vibrations of the AFM cantilever are examined as well as the nonlinear interaction between the AFM tip and the sample surface. An ultrasonic image taken with the new technique is shown
  • Keywords
    acoustic microscopy; atomic force microscopy; ultrasonic imaging; AFM cantilever; atomic force microscopy; atomic scale resolution; near-field acoustic microscopy; nonlinear interaction; sample surface; ultrasonic image; ultrasonic vibrations; Acoustic imaging/mapping; Acoustic microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
  • Conference_Location
    Cannes, France
  • Print_ISBN
    0-7803-2012-3
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1994.401611
  • Filename
    401611