Cascaded mechanical alignment for assembling 3D MEMS

We have designed, modeled, and demonstrated a mechanically-driven alignment method that enables the precise positioning of planar (2D) structures at arbitrary orientations to form 3D structures for microelectromechanical systems (MEMS). The method is based on a cascaded set of alignment features patterned on the actuated segments. The technique was demonstrated by assembling a corner-cube retro reflector. The bottom and sides of the corner-cube were initially patterned flat, as three adjacent square plates. The side plates were then actuated simultaneously until the first pair of alignment features engaged. Further actuation of only one of the plates brought both of them to their desired final positions. Starting with an initial misalignment of +/-11deg, the plates were aligned to accuracy within 1deg.