• DocumentCode
    292151
  • Title

    1.3 GHz DDL on the basis of narrow reflecting groove microrelief

  • Author

    Gulyaev, Yu.V. ; Grigorievski, V.I. ; Kmita, A.M. ; Krikunov, A.I. ; Sokolov, D.V.

  • Volume
    1
  • fYear
    1994
  • fDate
    Oct. 31 1994-Nov. 3 1994
  • Firstpage
    433
  • Abstract
    The results of an investigation concerning dispersive delay lines based on a SAW IDT with narrow gaps between electrodes (0.2-0.3 μm) and reflecting groove microrelief of the same width are reported. The fabrication technology is based on self consistent photolithography, which have been proposed recently for making SAW components of gigahertz frequency range. DDLs for signal expansion and compression with a center frequency of 1300 MHz, a frequency deviation of 150 MHz and impulse response duration of 2 μs were fabricated. Position weighting was applied to obtain a desired frequency response of down-chirp and up-chirp RACs. The investigations of DDL characteristics depending on submicron groove depth were carried out, and a method to compensate for technological deviations by means of variation in RAC configuration was used
  • Keywords
    acoustic microwave devices; chirp modulation; interdigital transducers; photolithography; pulse compression; surface acoustic wave delay lines; surface acoustic wave resonators; surface acoustic wave signal processing; surface acoustic wave transducers; transient response; ultrasonic delay lines; ultrasonic dispersion; ultrasonic transducer arrays; 0.2 to 0.3 mum; 1.3 GHz; 150 MHz; 2 mus; SAW IDT; dispersive delay lines; down-chirp RACs; fabrication technology; frequency deviation; impulse response duration; narrow reflecting groove microrelief; position weighting; self consistent photolithography; signal compression; signal expansion; submicron groove depth; up-chirp RACs; Chirp modulation; Interdigital transducers; Photolithography; Surface acoustic wave delay lines; Surface acoustic wave device fabrication; Surface acoustic wave pulse compression; Surface acoustic wave resonators; Surface acoustic wave transducers; UHF resonators;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
  • Conference_Location
    Cannes, France
  • Print_ISBN
    0-7803-2012-3
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1994.401624
  • Filename
    401624