DocumentCode
2921510
Title
Interfacing methods for fluidically-assembled microcomponents
Author
Tolley, M.T. ; Baisch, A. ; Krishnan, M. ; Erickson, D. ; Lipson, H.
Author_Institution
Cornell Univ., New York
fYear
2008
fDate
13-17 Jan. 2008
Firstpage
1073
Lastpage
1076
Abstract
Here we present the design and implementation of electrical and mechanical interfaces for fluidically-assembled planar MEMS. We discuss the design and fabrication of systems of passive mechanical latches to bond microcomponents together and of electrical layers capable of establishing electrical connections with each other. We evaluate the ability of components with these interfaces to bond together within a microfluidic channel and to establish electrical circuits when assembled. This work supports the development of a novel microassembly strategy that bridges the gap between bottom-up self-assembly and top-down direct-manipulation technique. The ultimate goal of this research is the development of MEMS devices capable of the on-demand self-assembly, repair, and reconfiguration.
Keywords
microassembling; microchannel flow; self-assembly; MEMS devices; direct-manipulation technique; electrical circuits; electrical connections; electrical layers; fluidically-assembled microcomponents; microassembly strategy; microfluidic channel; passive mechanical latches; planar MEMS; self-assembly; Assembly; Bonding; Circuits; Fabrication; Fluidic microsystems; Latches; Microassembly; Microfluidics; Micromechanical devices; Self-assembly;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location
Tucson, AZ
ISSN
1084-6999
Print_ISBN
978-1-4244-1792-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2008.4443845
Filename
4443845
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