DocumentCode :
2921510
Title :
Interfacing methods for fluidically-assembled microcomponents
Author :
Tolley, M.T. ; Baisch, A. ; Krishnan, M. ; Erickson, D. ; Lipson, H.
Author_Institution :
Cornell Univ., New York
fYear :
2008
fDate :
13-17 Jan. 2008
Firstpage :
1073
Lastpage :
1076
Abstract :
Here we present the design and implementation of electrical and mechanical interfaces for fluidically-assembled planar MEMS. We discuss the design and fabrication of systems of passive mechanical latches to bond microcomponents together and of electrical layers capable of establishing electrical connections with each other. We evaluate the ability of components with these interfaces to bond together within a microfluidic channel and to establish electrical circuits when assembled. This work supports the development of a novel microassembly strategy that bridges the gap between bottom-up self-assembly and top-down direct-manipulation technique. The ultimate goal of this research is the development of MEMS devices capable of the on-demand self-assembly, repair, and reconfiguration.
Keywords :
microassembling; microchannel flow; self-assembly; MEMS devices; direct-manipulation technique; electrical circuits; electrical connections; electrical layers; fluidically-assembled microcomponents; microassembly strategy; microfluidic channel; passive mechanical latches; planar MEMS; self-assembly; Assembly; Bonding; Circuits; Fabrication; Fluidic microsystems; Latches; Microassembly; Microfluidics; Micromechanical devices; Self-assembly;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
ISSN :
1084-6999
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2008.4443845
Filename :
4443845
Link To Document :
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