Title :
Integrable SAW sensor with identification facility
Author :
Enderlein, J. ; Schönberg, J. ; Chilla, E. ; Fröhlich, H.J.
fDate :
Oct. 31 1994-Nov. 3 1994
Abstract :
Sensor applications such as gas monitoring for environmental protection require wirelessly addressable sensors possessing a read out feasibility by a radio signal. We have developed a system concept for a fully integrable SAW sensor on GaAs which derives the advantage of monolithic integration of fast electronic circuits and highly sensitive SAW components on the same substrate. First we have realized the SAW delay line for mass detection and a SAW coder on GaAs. The electronic circuits were built as discrete components. A sensor output signal containing the address and the measuring value has been generated, transmitted as a spread spectrum signal by air, and received by correlation techniques
Keywords :
gallium arsenide; gas sensors; interdigital transducers; monitoring; radiotelemetry; surface acoustic wave delay lines; surface acoustic wave sensors; GaAs; SAW coder; SAW delay line; correlation techniques; electronic circuits; environmental protection; gas monitoring; identification facility; integrable SAW sensor; mass detection; monolithic integration; radio signal readout; spread spectrum signal; wirelessly addressable sensors; Gallium materials/devices; Gas detectors; Interdigital transducers; Monitoring; Radio telemetry; Surface acoustic wave delay lines; Surface acoustic wave detectors;
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1994.401635
