Title :
Microfabricated endoscopic probe integrated MEMS micromirror for optical coherence tomography bioimaging
Author :
Wang, Ming-Fang ; Xu, Yingshun ; Prem, C.S. ; Chen, Kelvin Wei Sheng ; Xie, Jin ; Mu, Xiaojing ; Tan, Chee Wei ; Yu, Aibin ; Feng, Hanhua
Author_Institution :
Inst. of Microelectron., Singapore, Singapore
fDate :
Aug. 31 2010-Sept. 4 2010
Abstract :
In this paper, we present a miniaturized endoscopic probe, consisted of MEMS micromirror, silicon optical bench (SiOB), grade index (GRIN) lens, single mode optical fiber (SMF) and transparent housing, for optical coherence tomography (OCT) bioimaging. Due to the use of the MEMS micromirror, the endoscopic OCT system is highly suitable for non-invasive imaging diagnosis of a wide variety of inner organs. The probe engineering and proof of concept were demonstrated by obtaining the two-dimensional OCT images with a cover slide and an onion used as standard samples and the axial resolution was around 10 μm.
Keywords :
bioMEMS; endoscopes; gradient index optics; microlenses; micromirrors; optical fibres; optical tomography; GRIN lens; OCT bioimaging; SiOB; endoscopic probe integrated MEMS micromirror; gradient index lens; microfabricated MEMS micromirror; miniaturized endoscopic probe; noninvasive imaging diagnosis; optical coherence tomography; silicon optical bench; single mode optical fiber; Biomedical optical imaging; Micromechanical devices; Micromirrors; Optical fibers; Optical imaging; Probes; Endoscopes; Equipment Design; Micro-Electrical-Mechanical Systems; Silicon; Tomography, Optical Coherence;
Conference_Titel :
Engineering in Medicine and Biology Society (EMBC), 2010 Annual International Conference of the IEEE
Conference_Location :
Buenos Aires
Print_ISBN :
978-1-4244-4123-5
DOI :
10.1109/IEMBS.2010.5626269
