Title :
Multi-channel SAW chemical sensor using 90 MHz SAW resonator and partial casting molecular films
Author :
Moriizumi, Toyosaka ; Saitou, Atsushi ; Nomura, Tooru
fDate :
Oct. 31 1994-Nov. 3 1994
Abstract :
The objective of the present study is to build a. chemical sensor utilizing the features of SAW devices. We developed the fine casting method (which was named as “droplet-surface casting method”), and deposited several kinds of adsorption films on a SAW device with a multi-channel structure. The device was ST cut quartz 90 MHz SAW resonator chips, each of which has two resonators on a substrate. We constructed a four channel odor sensing system that has one reference channel and three sensing channels using two chips of the device, and measured the response pattern of organic solvents which have same carbon number and different atomic group. We compared SAW sensors with quartz crystal microbalance ones, in terms of chemical sensor sensitivity due to using the mass loading effect
Keywords :
casting; gas sensors; quartz; sensitivity; surface acoustic wave resonators; surface acoustic wave sensors; 90 MHz; SAW chemical sensor; SAW resonator; ST cut quartz resonator chips; SiO2; adsorption films; chemical sensor sensitivity; droplet-surface casting; fine casting method; four channels odor sensing system; mass loading effect; multi-channel structure; multichannel SAW sensor; organic solvents; partial casting molecular films; Gas detectors; Quartz materials/devices; Sensitivity; Surface acoustic wave detectors; Surface acoustic wave device fabrication; Surface acoustic wave resonators;
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1994.401637
