Nanometric resolution ultrasonic stepper motor

Author

Snitka, Valentinas ; Mizariene, V. ; Baranauskas, V.

Volume

1

fYear

1994

fDate

Oct. 31 1994-Nov. 3 1994

Firstpage

553

Abstract

A new concept of a two-coordinate ultrasonic linear motor, based on the superposition of longitudinal vibrations of rod-shaped rectangular resonators, is presented. The new motor is capable of bidimensional nanometric step displacements with travel range in the centimeter range. Controlled linear motion with steps of less than 10 nm is demonstrated. We compare the influence of the friction pair materials on motor output characteristics. CVD-diamond, alumina ceramics and case-hardened steel were used as friction pair materials. Wear and surface microtopography were measured by Atomic Force Microscopy (AFM). Strong ultrasound influence on wear and deformation of the friction pair materials was found

Keywords

atomic force microscopy; friction; linear motors; stepping motors; ultrasonic motors; wear; 10 nm; Al₂O₃; C; CVD-diamond; alumina ceramics; atomic force microscopy; bidimensional nanometric step displacements; case-hardened steel; deformation; friction pair materials; longitudinal vibrations; rod-shaped rectangular resonators; surface microtopography; two-coordinate linear motor; ultrasonic stepper motor; wear; Acoustic motors; Linear motors; Mechanical factors; Stepper motors;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE

Conference_Location

Cannes, France

Print_ISBN

0-7803-2012-3

Type

conf

DOI

10.1109/ULTSYM.1994.401649

Filename

401649