Acoustically driven flow in flexural plate wave devices: theory and experiment

Author

Bradley, C.E. ; White, R.M.

Volume

1

fYear

1994

fDate

Oct. 31 1994-Nov. 3 1994

Firstpage

593

Abstract

In this paper a theoretical and experimental investigation of the acoustic streaming that occurs in the fluid near a silicon-based, micromachined flexural plate wave (FPW) device is presented. A method of incorporating source boundary condition effects, which have been neglected in the past, into streaming theory is outlined briefly. This modified streaming theory is then applied to the problem in which the acoustic source is a thin plate with flexural waves traversing it. The source boundary effect in that case has a profound influence on the streaming flow, which is allowed to slip at the surface of the plate. Theoretical now profiles with velocity maxima of over 500 μm/s agree well with those that are measured in FPW devices

Keywords

acoustic streaming; channel flow; elastic waves; flow; micromechanical devices; nonlinear acoustics; waves; 500 mum/s; Si; acoustic source; acoustic streaming; acoustically driven flow; flexural plate wave devices; fluid flow; silicon-based micromachined device; source boundary effect; Fluid flow; Microelectromechanical devices; Nonlinear acoustics; Waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE

Conference_Location

Cannes, France

Print_ISBN

0-7803-2012-3

Type

conf

DOI

10.1109/ULTSYM.1994.401657

Filename

401657