Title :
A preparative technique for spiral thin-film transformer at GHz frequency band
Author :
Zheng, Liang ; Qin, Huibin ; Daniels, Stephen
Author_Institution :
Nat. Centre for Plasma Sci. & Technol., Dublin City Univ., Dublin, Ireland
Abstract :
This paper present a preparative technique for spiral thin-film transformer with ferrite magnetic core. RF magnetron sputtering is used to prepare ferrite thin film on SiO2 layer. Compatible problems of thin film with IC technology are observed by SEM. The problems are resolved through sputtering parameters modification and heating treatment addition. S-parameters are measured at 10 MHz-20 GHz. The result shows that The experience result shows, magnetic core thin-film transformer with 15:15 ratio-turn can obtain the maximal transmission efficiency 80.9% at 10 MHz-20 GHz, and the air core transformer can obtain the maximal transmission efficiency 55.4% at same frequency range. Ferrite thin film can improve the transmission efficiency evidently.
Keywords :
S-parameters; UHF devices; VHF devices; ferrite devices; high-frequency transformers; magnetic microwave devices; magnetic thin film devices; silicon compounds; sputtering; transformer cores; RF magnetron sputtering; S-parameters; SEM; SiO2; air core transformer; efficiency 55.4 percent; efficiency 80.9 percent; ferrite magnetic core; ferrite thin film; frequency 10 MHz to 20 GHz; heating treatment; maximal transmission efficiency; preparative technique; spiral thin-film transformer; Ferrite films; Heat treatment; Magnetic cores; Magnetic films; Radio frequency; Scattering parameters; Spirals; Sputtering; Transformer cores; Transistors;
Conference_Titel :
Research in Microelectronics and Electronics, 2009. PRIME 2009. Ph.D.
Conference_Location :
Cork
Print_ISBN :
978-1-4244-3733-7
Electronic_ISBN :
978-1-4244-3734-4
DOI :
10.1109/RME.2009.5201354
