Title :
Finite element modeling of resonant microelectromechanical structures for sensing applications
fDate :
Oct. 31 1994-Nov. 3 1994
Abstract :
A general purpose consistent finite element method is developed for the direct numerical solution of small amplitude vibrations of crystal structures which are superposed on a static biasing state. The techniques discussed are applied to the modeling of resonant micro structures for sensing applications. The use of such structures is widespread in the development of microelectromechanical systems (MEMS) such as accelerometers, pressure and force sensors, temperature sensors, and resonant strain gauges. Numerical examples of some these structures are considered employing flexural vibration modes in devices constructed from silicon and quartz
Keywords :
finite element analysis; force measurement; micromechanical resonators; microsensors; pressure sensors; strain gauges; strain measurement; temperature measurement; temperature sensors; Si; SiO2; finite element modeling; flexural vibration modes; force sensors; pressure sensors; quartz; resonant microelectromechanical structures; resonant strain gauges; sensing applications; silicon; small amplitude vibrations; static biasing state; temperature sensors; Finite element methods; Force measurement; Microresonators; Microsensors; Pressure measurement; Strain measurement; Temperature measurement;
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1994.401668