DocumentCode
2921872
Title
A MEMS-based multi-sensor platform for consumer applications
Author
Alandry, Boris ; Mailly, Frederick ; Latorre, Laurent ; Nouet, Pascal
Author_Institution
LIRMM, Univ. Montpellier II, Montpellier, France
fYear
2009
fDate
12-17 July 2009
Firstpage
320
Lastpage
323
Abstract
This paper introduces an original MEMS multi-sensor platform for consumer applications. The whole set of sensors have been designed. manufactured and tested showing interesting performances for various type of applications. A demonstrator of a 3D orientation determination system has also been programmed on the platform proving the interest of such device.
Keywords
micromechanical devices; sensor fusion; 3D orientation determination system; MEMS multisensor platform; consumer application; Accelerometers; CMOS technology; Costs; Magnetic sensors; Manufacturing; Micromechanical devices; Microphones; Packaging; Sensor systems; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Research in Microelectronics and Electronics, 2009. PRIME 2009. Ph.D.
Conference_Location
Cork
Print_ISBN
978-1-4244-3733-7
Electronic_ISBN
978-1-4244-3734-4
Type
conf
DOI
10.1109/RME.2009.5201361
Filename
5201361
Link To Document