Title :
Advanced On-The-Fly Method with Correction of Initial Values to Characterize Negative Bias Temperature Instability Reliability
Author :
Benard, Christelle ; Ogier, Jean-Luc ; Goguenheim, Didier
Author_Institution :
ST Microelectron., Zone Ind. Rousset, Rousset
Abstract :
This paper presents a new on-the-fly (OTF) method in order to evaluate the effective threshold voltage (VT) shift without relaxation effects during negative bias temperature instability (NBTI) stresses on pMOSFETs. This method, called OTF_CIV, for on-the-fly with correction of initial values, allows us also to estimate the initial current at stress voltage, which is impossible to measure with an Agilent 4156 parameter analyzer due to the minimum measurement time.
Keywords :
MOSFET; semiconductor device reliability; initial value correction; negative bias temperature instability reliability; on-the-fly method; pMOSFET; threshold voltage shift; Current measurement; MOSFETs; Monitoring; Negative bias temperature instability; Niobium compounds; Stress measurement; Testing; Threshold voltage; Time measurement; Titanium compounds;
Conference_Titel :
Integrated Reliability Workshop Final Report, 2008. IRW 2008. IEEE International
Conference_Location :
S. Lake Tahoe, CA
Print_ISBN :
978-1-4244-2194-7
Electronic_ISBN :
1930-8841
DOI :
10.1109/IRWS.2008.4796076