Title :
Scheduling for Backend Manufacturing with SPTB Heuristic
Author_Institution :
Qimonda NA Corp., Sandston
Abstract :
In this paper, we address a mixed-model flow shop scheduling problem that is encountered in the Backend of a semiconductor fabrication facility. The problem is to determine both the production batch sizes of different products (models) and the sequence in which to release them for processing in the Backend facility so as to minimize average cycle time.
Keywords :
integrated circuit manufacture; scheduling; SPTB heuristic; backend manufacturing; mixed-model flow shop scheduling problem; semiconductor fabrication facility; Fabrication; Job shop scheduling; Manufacturing industries; Production facilities; Pulp manufacturing; Semiconductor device manufacture; Systems engineering and theory; Textile industry; Time measurement; Virtual manufacturing; engineering; manufacturing; manufacturing planning; manufacturing scheduling; modeling; optimization methods; production management; scheduling; systems engineering;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI
Conference_Location :
Stresa
Print_ISBN :
1-4244-0652-8
Electronic_ISBN :
1-4244-0653-6
DOI :
10.1109/ASMC.2007.375067
