DocumentCode :
2922179
Title :
Balanced Machine Workload Dispatching Scheme for Wafer Fab
Author :
Ham, Myoungsoo ; Fowler, John W.
Author_Institution :
Arizona State Univ., Tempe
fYear :
2007
fDate :
11-12 June 2007
Firstpage :
390
Lastpage :
395
Abstract :
A fab-wide dispatching scheme called balanced machine workload (BMW) which considers K-machine look ahead and J-machine look back is proposed. This research is motivated by the minimum inventory variability scheduling (MIVS) policy which considers the inventories at the next K-steps and the previous J-steps. Instead of looking at the fab flow from the step viewpoint, the BMW dispatching scheme looks at it from the machine viewpoint. The proposed dispatching scheme checks the workload of K-downstream machines and J-upstream machines for multiple products where K and J are dynamically calculated based on the current line status. Simulation results demonstrate the superior performance of the BMW dispatching scheme over MIVS.
Keywords :
dispatching; integrated circuit manufacture; scheduling; semiconductor technology; J-machine look back; K-machine look ahead; balanced machine workload dispatching; minimum inventory variability scheduling; wafer fabrication; Dispatching; Feeds; Fluctuations; Inventory management; Job shop scheduling; Manufacturing; Personnel; Throughput; Time measurement; Wet etching; Dispatching; Fab; Scheduling; Workload;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI
Conference_Location :
Stresa
Print_ISBN :
1-4244-0652-8
Electronic_ISBN :
1-4244-0653-6
Type :
conf
DOI :
10.1109/ASMC.2007.375069
Filename :
4259235
Link To Document :
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