Author :
Van Roijen, R. ; Collins, C. ; Ayala, J. ; Barker, K. ; Boiselle, H. ; Catlett, S. ; Dezfulian, K. ; Logan, R. ; Maxson, J. ; Ramachandran, R. ; Rawlins, B. ; Ruegsegger, S. ; Rust, T. ; Shepard, J. ; Singh, R.
Abstract :
The complexity of modern manufacturing processes has sharply increased the number of steps affecting device and circuit performance. We discuss a number of critical steps, their control methodology and how to minimize the time to detect. Product test results and data-mining are used to identify critical steps and to determine which inline signals require most attention. The last section is devoted to optimizing the analysis of inline electrical signals and their application to tool control.
Keywords :
data mining; process control; semiconductor device manufacture; semiconductor device testing; data-mining; manufacturing process control; product testing; semiconductor device manufacture; time-to-respond; Circuit optimization; Circuit testing; Implants; Manufacturing automation; Manufacturing processes; Microelectronics; Rapid thermal annealing; Signal analysis; Signal processing; Temperature control; 300mm manufacturing; Manufacturing automation; Process control; SOI;
