Noncontact characterization of crystal surface and thin films by the phase velocity scanning of laser interference fringes

Author

Yamanaka, K. ; Nishino, H. ; Cho, H. ; Nagata, Y. ; Koda, T. ; Inaba, M. ; Sato, A. ; Tsukahara, Y.

Volume

2

fYear

1994

fDate

Oct. 31 1994-Nov. 3 1994

Firstpage

1211

Abstract

We present the first application of a novel noncontact velocity measurement method of surface acoustic waves (SAW) to evaluation of thin films. This method uses laser interference fringes scanned at the phase velocity of SAW. The scanning interference fringes (SIF) are produced by intersecting two laser beams with a frequency difference. It was found that the Si₃N₄ film prepared by low pressure CVD had similar elastic properties to that of a sintered body. The dispersive Sezawa waves on the flame hydrolysis deposited SiO₂ films on Si (100) surface were detected. Comparing the measured Sezawa wave velocity with calculated velocity, the films were found to be much softer than bulk SiO₂ (fused quartz)

Keywords

CVD coatings; elasticity; insulating thin films; light interference; silicon compounds; surface acoustic waves; ultrasonic dispersion; ultrasonic velocity; ultrasonic velocity measurement; Si; Si [100] surface; Si₃N₄ CVD film; Si₃N₄-Si; SiO₂ films; SiO₂-Si; crystal surface; dispersive Sezawa waves; elastic properties; flame hydrolysis deposition; frequency difference; laser interference fringes; low pressure CVD; noncontact surface characterization; noncontact velocity measurement method; phase velocity scanning; scanning interference fringes; surface acoustic waves; thin films; Acoustic velocity measurement; Acoustooptic measurements; CVD; Dielectric films; Mechanical factors; Silicon materials/devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE

Conference_Location

Cannes, France

Print_ISBN

0-7803-2012-3

Type

conf

DOI

10.1109/ULTSYM.1994.401803

Filename

401803