Title :
Finite element modeling of an ultrasonic capacitive transducer
Author :
Adamowski, Julio C. ; Silva, Emilio C N ; Simon, Claudio ; Buiochi, Flávio ; Higuti, Ricardo T.
fDate :
Oct. 31 1994-Nov. 3 1994
Abstract :
A model for an ultrasonic capacitive transducer based on the finite element method has been proposed in order to allow in depth study of the central frequency, the frequency bandwidth and the transduction efficiency. The involved electrical and mechanical phenomena and their coupling by the electrostatic force are discussed. This model considers the air inside the grooves, the shape and size of the grooves, the mechanical tension applied to the membrane, and its mass and elasticity. The model was implemented using the ANSYS software
Keywords :
acoustoelectric transducers; capacitance measurement; finite element analysis; ultrasonic transducers; ANSYS software; central frequency; electromechanical phenomena; electrostatic force; finite element modeling; frequency bandwidth; grooves; mechanical tension; transduction efficiency; ultrasonic capacitive transducer; Acoustoelectric transducers; Capacitance transducers; Finite element methods;
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1994.401813
