Title :
MEMS WDM routers using analog micromirror arrays
Author :
Wu, Ming C. ; Tsai, Jui-che ; Huang, Sophia ; Hah, Dmyomg
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
We report on the recent progresses in our MEMS wavelength-division-multiplexed routers with a 1D array of analog micromirrors for wavelength-selective switching among multiple fibers.
Keywords :
micromachining; micromirrors; multiplexing equipment; optical arrays; telecommunication network routing; wavelength division multiplexing; 1D array; MEMS WDM routers; analog micromirror arrays; five-polysilicon-layer surface-micromachining process; multiple fibers; wavelength-division-multiplexed networks; wavelength-selective switching; Actuators; Low voltage; Micromechanical devices; Micromirrors; Mirrors; Optical add-drop multiplexers; Planarization; Stability; WDM networks; Wavelength division multiplexing;
Conference_Titel :
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7500-9
DOI :
10.1109/LEOS.2002.1159441
