Title :
Yield Aware Equipment Preventive Maintenance (PM) Optimization
Author :
Inani, A. ; Kim, J. ; Liao, M. ; Shimazu, K. ; Lin, Y. ; Arthanari, S. ; Stine, B.
Author_Institution :
PDF Solutions, San Jose
Abstract :
Typically equipment PM optimization and strategy is determined using a mix of various sources and inline inspection. In this work, the need for a more yield aware optimization strategy is recognized and recommendations made to implement this.
Keywords :
inspection; preventive maintenance; inline inspection; preventive maintenance optimization; yield aware equipment preventive maintenance; yield aware optimization; Drilling; Inspection; Optimization methods; Performance evaluation; Performance gain; Preventive maintenance; Production; Productivity; Testing; Throughput;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI
Conference_Location :
Stresa
Print_ISBN :
1-4244-0652-8
Electronic_ISBN :
1-4244-0653-6
DOI :
10.1109/ASMC.2007.375098
