DocumentCode

2923027

Title

Impact of Oxygen Vacancies Profile and Fringe Effect on Leakage Current Instability of Ta2O5 MIM Capacitors

Author

Martinez, V. ; Besset, C. ; Monsieur, F. ; Montès, L. ; Ghibaudo, G.

Author_Institution

STMicroelectronics, Crolles, France; IMEP-LAHC, INP Grenoble MINATEC, France. vincent.martinez@st.com

fYear

2008

fDate

12-16 Oct. 2008

Firstpage

1

Lastpage

21

Keywords

Leakage current; Oxygen;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Reliability Workshop Final Report, 2008. IRW 2008. IEEE International

Conference_Location

South lake Tahoe, CA, USA

ISSN

1930-8841

Print_ISBN

978-1-4244-2194-7

Electronic_ISBN

1930-8841

Type

conf

DOI

10.1109/IRWS.2008.4796124

Filename

4796124