DocumentCode
2923118
Title
Temperature (6-300K) Dependence Comparison of Carrier Transport Mechanisms in HfO2 /SiO2 and SiO2 MOS Gate Stacks
Author
Southwick, Richard G., III ; Reed, J. ; Buu, C. ; Bui, H. ; Butler, R. ; Bersuker, G. ; Knowlton, W.B.
Author_Institution
Department of Electrical & Computer Engineering, Boise State University, Boise ID
fYear
2008
fDate
12-16 Oct. 2008
Firstpage
1
Lastpage
21
Keywords
Hafnium oxide; Temperature dependence;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop Final Report, 2008. IRW 2008. IEEE International
Conference_Location
South lake Tahoe, CA, USA
ISSN
1930-8841
Print_ISBN
978-1-4244-2194-7
Electronic_ISBN
1930-8841
Type
conf
DOI
10.1109/IRWS.2008.4796130
Filename
4796130
Link To Document