A micro membrane pump with electrostatic actuation

Author

Zengerle, R. ; Richter, A. ; Sandmaier, H.

Author_Institution

Fraunhofer Inst. for Solid State Technol., Munchen, Germany

fYear

1992

fDate

4-7 Feb 1992

Firstpage

19

Lastpage

24

Abstract

A bulk micromachined membrane pump with outer dimensions of 7 mm×7 mm×2 mm and electrostatic actuation is presented. The micropump consists of four silicon chips, which form two passive check valves, a pump membrane and a counterelectrode for electrostatic actuation. Direct electrostatic forces are used for the deflection of the pump membrane, which has an area of 4 mm×4 mm and a thickness of 25 μm. The liquid to be pumped is not subjected to any electrical field. The separation between the movable membrane and the electrically isolated stator is 4 μm

Keywords

electric actuators; electrostatic devices; membranes; micromechanical devices; pumps; silicon; 1 to 100 Hz; Si chips; bulk micromachined membrane pump; counterelectrode; electrostatic actuation; micro membrane pump; passive check valves; Biomembranes; Electrostatic actuators; Fluid flow; Frequency; Micropumps; Pumps; Silicon; Stators; Valves; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE

Conference_Location

Travemunde

Print_ISBN

0-7803-0497-7

Type

conf

DOI

10.1109/MEMSYS.1992.187684

Filename

187684