Title :
Precision machine design: macromachine design philosophy and its applicability to the design of micromachines
Author :
Slocum, Alexander H.
Author_Institution :
Dept. of Mech. Eng., MIT, Cambridge, MA, USA
Abstract :
Macromachine design philosophies that may be of use to micromachining designs are reviewed. Definitions are provided for the precision engineering terms accuracy, repeatability, resolution, and Abbe error. Topics covered include predicting errors to mechanical systems, such as linear motion system errors, axis of rotation errors, and thermal growth errors, as well as issues relating to bearings, position measurement systems, and kinematic and elastically averaged design
Keywords :
errors; kinematics; micromechanical devices; small electric machines; Abbe error; accuracy; axis of rotation errors; bearings; elastically averaged design; kinematic design; linear motion system errors; macromachine design philosophy; micromachining designs; position measurement systems; precision engineering terms; precision machine design; repeatability; resolution; thermal growth errors; Accelerometers; Diffraction gratings; Electromechanical systems; Engines; History; Manufacturing; Mechanical engineering; Precision engineering; Servomechanisms; Transducers;
Conference_Titel :
Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE
Conference_Location :
Travemunde
Print_ISBN :
0-7803-0497-7
DOI :
10.1109/MEMSYS.1992.187687
