Surface micromachining materials

Surface micromachining is an attractive micro technology since it exploits very closely the materials, process technology and manufacturing methodology developed for the semiconductor industry. Three dimension structures are created through sequential deposition, patterning and selective removal of layers deposited onto the surface of a silicon wafer. A great advantage of surface micromachining is that the wafer may contain active signal processing electronics. In this way integrated electromechanical devices on the scale of 100 μm can be realised