AC and DC voltage standards based on silicon micromechanics

Author

Suhonen, M. ; Seppa, H. ; Oja, A.S. ; Heinila, M. ; Nakki, I.

Author_Institution

VTT Autom., Finland

fYear

1998

fDate

6-10 July 1998

Firstpage

23

Lastpage

24

Abstract

Micromechanical AC and DC standards, suitable for compact, low-cost precision electronics applications are described. The standards are based on controlling the charge of a parallel-moving-plate capacitor. We expect that the voltage standards based on mechanical and geometrical properties of single crystalline silicon can have a high stability. We show the basic principle of the AC and DC standards and preliminary experiments with the AC voltage standard.

Keywords

capacitive sensors; elemental semiconductors; measurement standards; micromechanical resonators; silicon; voltage measurement; AC voltage standards; DC voltage standards; Si; charge control; electrostatic force; geometrical properties; high stability; high-Q micromachined oscillators; low-cost precision electronics applications; mechanical properties; micromechanical standards; parallel-moving-plate capacitor; resonant frequency shift; silicon micromechanics; spring suspended electrode; Capacitance; Capacitors; Electrostatics; Measurement standards; Numerical simulation; Performance evaluation; Resonance; Resonant frequency; Silicon; Voltage measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Precision Electromagnetic Measurements Digest, 1998 Conference on

Conference_Location

Washington, DC, USA

Print_ISBN

0-7803-5018-9

Type

conf

DOI

10.1109/CPEM.1998.699739

Filename

699739