Title :
AC and DC voltage standards based on silicon micromechanics
Author :
Suhonen, M. ; Seppa, H. ; Oja, A.S. ; Heinila, M. ; Nakki, I.
Author_Institution :
VTT Autom., Finland
Abstract :
Micromechanical AC and DC standards, suitable for compact, low-cost precision electronics applications are described. The standards are based on controlling the charge of a parallel-moving-plate capacitor. We expect that the voltage standards based on mechanical and geometrical properties of single crystalline silicon can have a high stability. We show the basic principle of the AC and DC standards and preliminary experiments with the AC voltage standard.
Keywords :
capacitive sensors; elemental semiconductors; measurement standards; micromechanical resonators; silicon; voltage measurement; AC voltage standards; DC voltage standards; Si; charge control; electrostatic force; geometrical properties; high stability; high-Q micromachined oscillators; low-cost precision electronics applications; mechanical properties; micromechanical standards; parallel-moving-plate capacitor; resonant frequency shift; silicon micromechanics; spring suspended electrode; Capacitance; Capacitors; Electrostatics; Measurement standards; Numerical simulation; Performance evaluation; Resonance; Resonant frequency; Silicon; Voltage measurement;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 1998 Conference on
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-5018-9
DOI :
10.1109/CPEM.1998.699739
