DocumentCode

2923282

Title

Negative Bias Temperature Stress on PFETs within fast Wafer Level Reliability Monitoring

Author

Vollertsen, R.-P. ; Reisinger, H. ; Schlünder, C.

Author_Institution

Infineon Technologies AG, Otto-Hahn-Ring 6, 81739 Munchen, Germany

fYear

2008

fDate

12-16 Oct. 2008

Firstpage

1

Lastpage

17

Keywords

Monitoring; Stress; Temperature; Zirconium;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Reliability Workshop Final Report, 2008. IRW 2008. IEEE International

Conference_Location

South lake Tahoe, CA, USA

ISSN

1930-8841

Print_ISBN

978-1-4244-2194-7

Electronic_ISBN

1930-8841

Type

conf

DOI

10.1109/IRWS.2008.4796139

Filename

4796139