DocumentCode
2923305
Title
Excimer laser ablation based microlens fabrication in polymer materials
Author
Naessens, K. ; Van Daele, Peter ; Baets, R.
Author_Institution
IMEC Dept. of Inf. Technol., Ghent Univ., Gent, Belgium
Volume
2
fYear
2002
fDate
10-14 Nov. 2002
Firstpage
655
Abstract
We demonstrate that excimer laser ablation can be applied successfully to fabricate microlenses and arrays of microlenses in an easy set-up allowing great flexibility in terms of size, shape and focal length of the lenses. Due to the non-contact and direct-write nature of the process, the technique allows easy insertion of micro-optics in a late phase of a heterogeneous optoelectronic assembly.
Keywords
excimer lasers; laser ablation; microlenses; optical arrays; optical fabrication; optical polymers; excimer laser ablation; heterogeneous optoelectronic assembly; micro-optics insertion; microlens arrays; microlens fabrication; microlens focal length; microlens shape; microlens size; polymer materials; Assembly; Laser ablation; Laser beams; Lenses; Microoptics; Optical arrays; Optical device fabrication; Optical materials; Optical pulses; Polymers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
ISSN
1092-8081
Print_ISBN
0-7803-7500-9
Type
conf
DOI
10.1109/LEOS.2002.1159476
Filename
1159476
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