Title :
Analysis of a split-bar torsional micromirror characteristics
Author :
Sridhar, V. ; Srinivas, T.
Abstract :
We present the analysis of a torsional micromirror for use in optical switching applications. The pull-in characteristics and the resonant frequency variations of our proposed split-bar design show an improved performance.
Keywords :
electro-optical switches; electrostatic devices; micromirrors; torque; torsion; elastic recovery torque; electrostatic torque; mechanical torque; mirror geometry; optical switching applications; pull-in characteristics; resonant frequency variations; split-bar design; split-bar torsional micromirror characteristics; Electrodes; Electrostatics; Equations; Geometry; Micromirrors; Mirrors; Resonant frequency; Shape; Torque; Voltage;
Conference_Titel :
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7500-9
DOI :
10.1109/LEOS.2002.1159482
