DocumentCode
2923413
Title
Analysis of a split-bar torsional micromirror characteristics
Author
Sridhar, V. ; Srinivas, T.
Volume
2
fYear
2002
fDate
10-14 Nov. 2002
Firstpage
667
Abstract
We present the analysis of a torsional micromirror for use in optical switching applications. The pull-in characteristics and the resonant frequency variations of our proposed split-bar design show an improved performance.
Keywords
electro-optical switches; electrostatic devices; micromirrors; torque; torsion; elastic recovery torque; electrostatic torque; mechanical torque; mirror geometry; optical switching applications; pull-in characteristics; resonant frequency variations; split-bar design; split-bar torsional micromirror characteristics; Electrodes; Electrostatics; Equations; Geometry; Micromirrors; Mirrors; Resonant frequency; Shape; Torque; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
ISSN
1092-8081
Print_ISBN
0-7803-7500-9
Type
conf
DOI
10.1109/LEOS.2002.1159482
Filename
1159482
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