DocumentCode
2923571
Title
First Demonstration of MSM Photodetectors in Bulk GaInNAs Layers
Author
Hsu, S.H. ; Su, Y.K. ; Chang, S.J. ; Chuang, R.W. ; Chen, W.C.
Author_Institution
Institute of Microelectronics & Department of Electrical Engineering, National Cheng Kung University Taiwan 710, Tainan; q1891119@ccmail.ncku.edu.tw
fYear
2005
fDate
30-02 Aug. 2005
Firstpage
861
Lastpage
862
Abstract
Metal-Semiconductor-Metal (MSM) photodetectors with thick Ga0.85 In0.15 N0.011 As0.989 epilayers were fabricated. With small amount of incorporating nitrogen, thick and dislocation-free GaInNAs/GaAs material for absorption layers can be achieved. Photocurrent spectra show that a responsivity higher than 0.06 A/W at 4V is obtained with a cutoff wavelength of 1.2μm.
Keywords
Absorption; Charge carrier lifetime; Gallium arsenide; Leakage current; Nitrogen; Optical fiber communication; Optical materials; Photoconductivity; Photodetectors; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN
0-7803-9242-6
Type
conf
DOI
10.1109/CLEOPR.2005.1569576
Filename
1569576
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