A comparative study of bearing designs and operational environments for harmonic side-drive micromotors

Author

Dhuler, V.R. ; Mehregany, M. ; Phillips, S.M. ; Lang, J.H.

Author_Institution

Dept. of Electr. Eng. & Appl. Phys., Case Western Reserve Univ., Cleveland, OH, USA

fYear

1992

fDate

4-7 Feb 1992

Firstpage

171

Lastpage

176

Abstract

The authors report the development of flange bearing harmonic side-drive (referred to as wobble) micromotors and the results from a comparative study of the operation of flange and center-pin bearing micromotors in different gas environments. Both the flange and center-pin wobble micromotors have been operated with excitation as low as 30 V across 1.5 μm rotor/stator gaps. In contrast to the center-pin bearing wobble micromotors it was found that the performance of the flange bearing wobble micromotors is not significantly affected by the operational environment. A convenient experimental procedure to characterize friction in wobble micromotors has been developed. Additionally, the requisite wobble micromotor dynamic model for extracting the bearing and bushing/flange frictional parameters from the experimental data is discussed

Keywords

friction; machine bearings; machine theory; micromechanical devices; small electric machines; 1.5 micron; 30 V; bearing designs; center-pin bearing; comparative study; dynamic model; experimental data; experimental procedure; fabrication; flange bearing; friction; frictional parameters; gas environments; gear ratios; harmonic side-drive micromotors; operation; operational environments; performance; wobble micromotors; Contacts; Fabrication; Flanges; Friction; Gears; Insulators; Micromotors; Physics; Rotors; Stators;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE

Conference_Location

Travemunde

Print_ISBN

0-7803-0497-7

Type

conf

DOI

10.1109/MEMSYS.1992.187713

Filename

187713