Creation of an insect-based microrobot with an external skeleton and elastic joints

The concept of making a microrobot with an external skeleton, like an insect, and its implementation using rigid plates and elastic joints is described. A large-scale model consisting of plastic plates and solenoids is shown to demonstrate this motion. Several microsized models using polysilicon plates and polyimide joints have been built on silicon wafers. By folding these at the joints, just like paper, three-dimensional structures can be constructed. These structures can be actuated by electrostatic force