Creation of an insect-based microrobot with an external skeleton and elastic joints

Author

Suzuki, Kenji ; Shimoyama, Isao ; Miura, Hirofumi ; Ezura, Yuichi

Author_Institution

Dept. of Mechano-Inf., Tokyo Univ., Japan

fYear

1992

fDate

4-7 Feb 1992

Firstpage

190

Lastpage

195

Abstract

The concept of making a microrobot with an external skeleton, like an insect, and its implementation using rigid plates and elastic joints is described. A large-scale model consisting of plastic plates and solenoids is shown to demonstrate this motion. Several microsized models using polysilicon plates and polyimide joints have been built on silicon wafers. By folding these at the joints, just like paper, three-dimensional structures can be constructed. These structures can be actuated by electrostatic force

Keywords

mechatronics; micromechanical devices; mobile robots; polymers; Si wafers; demonstration model; elastic joints; electrostatic force actuation; external skeleton; folding process; insect-based microrobot; large-scale model; microsized models; polyimide joints; polysilicon plates; rigid plates; three-dimensional structures; Electrostatics; Insects; Joints; Large-scale systems; Plastics; Polyimides; Semiconductor device modeling; Silicon; Skeleton; Solenoids;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE

Conference_Location

Travemunde

Print_ISBN

0-7803-0497-7

Type

conf

DOI

10.1109/MEMSYS.1992.187716

Filename

187716