Title :
Correlation between single crystal LaB6 cathode optical and emission images
Author :
Katsap, V. ; Chising Lai
Author_Institution :
NuFlare Technol., Hopewell Junction, NY, USA
Abstract :
LaB6 cathode is the emitter of choice in electron beam lithography tools. In commercial LaB6 cathodes, the (100) crystalline plane is used as the emissive surface. Typical size of emitter is ~70 μm DIA. Quality control is usually done by observing (100) surface with a powerful microscope. Emission images of the same cathodes often reveal irregularities practically invisible or barely visible neither in optical microscope nor in SEM. We have obtained emission images of the LaB6 cathodes and compared them to optical and SEM images.
Keywords :
cathodes; crystals; electron beam lithography; lanthanum compounds; optical images; optical microscopes; quality control; scanning electron microscopy; LaB6; SEM images; crystalline plane; electron beam lithography tools; emission images; emissive surface; emitter; optical microscope; powerful microscope; quality control; single crystal cathode optical images; Cathodes; Correlation; Crystals; Image resolution; Optical imaging; Stimulated emission; LaB6 cathode; e-beam lithography; emission imaging;
Conference_Titel :
Vacuum Electron Sources Conference (IVESC), 2012 IEEE Ninth International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4673-0368-2
DOI :
10.1109/IVESC.2012.6264179
