Dynamic response of thermally tunable micromachined optical filter with low tuning voltage

Author

Amano, T. ; Hino, T. ; Koyama, F. ; Arai, M. ; Matsutani, A.

Author_Institution

Microsystem Res. Center, Tokyo Inst. of Technol., Yokohama, Japan

Volume

2

fYear

2002

fDate

10-14 Nov. 2002

Firstpage

829

Abstract

We present some tuning characteristics of a GaAlAs/GaAs micromachined tunable filter with a thermal strain control layer and heating element integrated on a top surface. We present the design of micromachined filters for a wide tuning range and for fast wavelength tuning. Experimentally, we demonstrate the fast tuning response with rise time and fall time of below 100 μs.

Keywords

III-V semiconductors; aluminium compounds; electro-optical filters; gallium arsenide; micro-optics; micromachining; optical tuning; thermo-optical devices; 100 mus; GaAlAs-GaAs; GaAlAs/GaAs micromachined tunable filter; design; dynamic response; fall time; fast wavelength tuning; heating element; low tuning voltage; rise time; thermal strain control layer; thermally tunable micromachined optical filter; top surface; tuning characteristics; wide tuning range; Electrodes; Gallium arsenide; Heating; Laser tuning; Low voltage; Optical filters; Optical tuning; Strain control; Thermal force; Tunable circuits and devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE

ISSN

1092-8081

Print_ISBN

0-7803-7500-9

Type

conf

DOI

10.1109/LEOS.2002.1159564

Filename

1159564