DocumentCode
2925278
Title
Influence of cap layer on interdiffusion in InP/InGaAs quantum wells
Author
Carmody, C. ; Tan, H.H. ; Jagadish, C.
Author_Institution
Dept. of Electron. Mater. Eng., Australian Nat. Univ., Canberra, ACT, Australia
Volume
2
fYear
2002
fDate
10-14 Nov. 2002
Firstpage
845
Abstract
Summary form only given. Shallow ion implantation was used to study the effect of cap layer and implant temperature in the InP/InGaAs quantum well system. The greatest shifts occur at a dose of 1×1014 cm-2, at 200 °C for the InP capped sample and at room temperature for the InGaAs capped sample.
Keywords
III-V semiconductors; chemical interdiffusion; gallium arsenide; indium compounds; integrated optics; ion implantation; photoluminescence; semiconductor quantum wells; spectral line shift; 200 C; 25 C; InGaAs capped sample; InP capped sample; InP-InGaAs; InP/InGaAs quantum wells; InP:Fe; PL energy shift; cap layer; low temperature photoluminescence spectra; photonic device integration; quantum well interdiffusion; semi insulating InP:Fe substrates; Implants; Impurities; Indium gallium arsenide; Indium phosphide; Laser tuning; Optical device fabrication; Photonic band gap; Quantum well lasers; Rapid thermal annealing; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
ISSN
1092-8081
Print_ISBN
0-7803-7500-9
Type
conf
DOI
10.1109/LEOS.2002.1159572
Filename
1159572
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