Title :
P4-3: Two-dimensional millimeter wave photonic crystals fabricated by wet etching of silicon
Author :
Kim, Jung-Il ; Jeon, Seok-Gy ; Han, Seong-Tae ; Kim, Geun-Ju ; Lee, Huyn-Haeng ; Park, Si-Hyun
Author_Institution :
Center for Pioneering Med.-Phys. Res., Korea Electrotechnol. Res. Inst., Ansan, South Korea
Abstract :
Two-dimensional millimeter wave photonic crystals (PCs) are fabricated by wet etching of the high-resistivity (HR) silicon. The measured and the simulated transmittance demonstrate the formation of the photonic-band-gap (PBG) at the frequencies of about 100 GHz.
Keywords :
Dry etching; Fabrication; Finite difference methods; Frequency measurement; Millimeter wave measurements; Personal communication networks; Photonic crystals; Silicon compounds; Time domain analysis; Wet etching; millimeter wave; photonic crystals; photonic-band-gap; silicon; wet etching;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2010 IEEE International
Conference_Location :
Monterey, CA, USA
Print_ISBN :
978-1-4244-7098-3
DOI :
10.1109/IVELEC.2010.5503453
