DocumentCode :
2925947
Title :
Low Temperature Molding for High Space Coverage Microlens Arrays
Author :
Wang, Kerwin ; Bohringer, Karl F.
Author_Institution :
Electrical Engineering Department, University of Washington, USA kerwin@ee.washington.edu
fYear :
2005
fDate :
30-02 Aug. 2005
Firstpage :
1291
Lastpage :
1292
Abstract :
This paper presents SF6/O2plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.
Keywords :
Lenses; Materials testing; Microoptics; Optical distortion; Optical materials; Optical refraction; Optical variables control; Plasma applications; Plasma displays; Plasma temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
Type :
conf
DOI :
10.1109/CLEOPR.2005.1569726
Filename :
1569726
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2925947
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