• DocumentCode
    2926230
  • Title

    Low Voltage Variable Optical Attenuator Made by the Low-Cost Micromachining Wet-Etching Technique

  • Author

    Hung, S.H. ; Chiu, C.E. ; Su, G-D.J. ; Jiang, F.

  • Author_Institution
    Graduate Institute of Electro-Optical Engineering, National Taiwan University, Taiwan
  • fYear
    2005
  • fDate
    30-02 Aug. 2005
  • Firstpage
    1374
  • Lastpage
    1375
  • Abstract
    A variable optical attenuator has been fabricated by bulk silicon-micromachining. The attenuation is achieved by moving a mirror into light path. The controllable attenuation range is up to 40 dB with actuation voltage less than 3 volts.
  • Keywords
    Optical MEMS; Variable optical attenuator (VOA); WDM; Low voltage; Micromachining; Micromechanical devices; Mirrors; Optical attenuators; Optical beams; Optical collimators; Optical devices; Optical surface waves; Wet etching; Optical MEMS; Variable optical attenuator (VOA); WDM;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
  • Print_ISBN
    0-7803-9242-6
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2005.1569741
  • Filename
    1569741
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2926230