Title :
Low Voltage Variable Optical Attenuator Made by the Low-Cost Micromachining Wet-Etching Technique
Author :
Hung, S.H. ; Chiu, C.E. ; Su, G-D.J. ; Jiang, F.
Author_Institution :
Graduate Institute of Electro-Optical Engineering, National Taiwan University, Taiwan
Abstract :
A variable optical attenuator has been fabricated by bulk silicon-micromachining. The attenuation is achieved by moving a mirror into light path. The controllable attenuation range is up to 40 dB with actuation voltage less than 3 volts.
Keywords :
Optical MEMS; Variable optical attenuator (VOA); WDM; Low voltage; Micromachining; Micromechanical devices; Mirrors; Optical attenuators; Optical beams; Optical collimators; Optical devices; Optical surface waves; Wet etching; Optical MEMS; Variable optical attenuator (VOA); WDM;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569741
