DocumentCode
2926558
Title
Applications of AlN thin-film resonator topologies as antennas and sensors
Author
Weber, R.J. ; Burns, S.G. ; Campbell, C.F. ; O´Toole, R.
Author_Institution
Dept. of Electr. Eng. & Comput. Eng., Iowa State Univ., Ames, IA, USA
fYear
1992
fDate
1-5 June 1992
Firstpage
161
Abstract
The authors report on two novel microwave applications of thin-film resonator (TFR) technology. The first application is the use of an array of TFRs as an on-wafer, phased-array antenna; the second is a gas and chemical mass sensor with nanogram sensitivity.<>
Keywords
aluminium compounds; antenna phased arrays; crystal resonators; electric sensing devices; gas sensors; mass measurement; microstrip antennas; microwave antenna arrays; piezoelectric transducers; solid-state microwave devices; thin film devices; AlN; bulk acoustic wave resonator; chemical mass sensor; gas sensor; microwave applications; nanogram sensitivity; onwafer antenna; phased-array antenna; thin-film resonator topologies; Antenna arrays; Application software; Chemical sensors; Chemical technology; Dielectric losses; Phased arrays; Sensor arrays; Silicon; Thin film sensors; Topology;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1992., IEEE MTT-S International
Conference_Location
Albuquerque, NM, USA
ISSN
0149-645X
Print_ISBN
0-7803-0611-2
Type
conf
DOI
10.1109/MWSYM.1992.187934
Filename
187934
Link To Document